Traceable profilometry with a 3D nanopositioning unit and zero indicating sensors in compensation method

Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine

In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surfa...

Nanopositioning with multiple sensors: MISO control and inherent sensor fusion

There is a strong motivation for using multiple sensors for feedback control in ultrahigh accuracy data storage devices such as a probe-based data storage device. One elegant way to design such controllers using multiple sensors is to design a direct multi-input-single-output (MISO) controller using either the H2 or H∞ control design paradigm. In this paper we discuss the control of a micro-sca...

O-ring Surface Inspection With 3D Profilometry

A Robust Method to Detect Zero Velocity for Improved 3D Personal Navigation Using Inertial Sensors

This paper proposes a robust zero velocity (ZV) detector algorithm to accurately calculate stationary periods in a gait cycle. The proposed algorithm adopts an effective gait cycle segmentation method and introduces a Bayesian network (BN) model based on the measurements of inertial sensors and kinesiology knowledge to infer the ZV period. During the detected ZV period, an Extended Kalman Filte...

solution of security constrained unit commitment problem by a new multi-objective optimization method

چکیده-پخش بار بهینه به عنوان یکی از ابزار زیر بنایی برای تحلیل سیستم های قدرت پیچیده ،برای مدت طولانی مورد بررسی قرار گرفته است.پخش بار بهینه توابع هدف یک سیستم قدرت از جمله تابع هزینه سوخت ،آلودگی ،تلفات را بهینه می کند،و هم زمان قیود سیستم قدرت را نیز برآورده می کند.در کلی ترین حالتopf یک مساله بهینه سازی غیر خطی ،غیر محدب،مقیاس بزرگ،و ایستا می باشد که می تواند شامل متغیرهای کنترلی پیوسته و گ...